Hitachi, Ltd. (TSE:6501) and IMEC today announced that they will cooperate on the 
development of manufacturable gate-stack processes needed for (sub-)70nm devices. With 
Hitachi joining IMEC's industrial affiliation program on high-k dielectrics, the program 
evolves to a true global cooperation aiming to overcome one of the major roadblocks of 
the ITRS (international technology roadmap for semiconductors).

Hitachi and IMEC will collaborate to develop dedicated equipment, materials and processes 
for gate stacks for 70nm and smaller semiconductor devices. The agreement is for 3 years 
and during the entire duration of the contract a researcher of Hitachi will reside at IMEC.
The work program includes all required aspects to develop this new gate stack: deposition 
of high-k dielectrics using ALCVD (atomic-layer chemical vapor deposition) and MOCVD (metal
-organic CVD), cleaning and contamination control, physical and electrical characterization 
of high-k materials, reliability of gate stack and transistors, metal gates, process 
integration issues and ES&H (environment, safety and health) considerations. The initial 
EOT (effective oxide thickness) targeted is 1nm. However, the final aim is a feasibility 
demonstration of 0.5nm EOT gate stack. 

As semiconductor devices shrink, conventional processes and materials approach their 
physical limits. To take full advantage of the reduced design rules of the ITRS, the 
industry must move to thinner effective gate dielectrics for (sub-)70nm devices. Silicon 
dioxide is unable to perform at these reduced thicknesses because of excessive leakage 
and reliability problems.

"The semiconductor industry has been built on silicon dioxide", states Gilbert Declerck, 
president and CEO of IMEC. "We are now facing a point where the heart of the MOS transistor 
has to be replaced." A broad range of expertise in various fields is undoubtedly required 
to develop novel gate stacks using high-k dielectrics and metal gates. "The only way to 
overcome this major roadblock of the ITRS is by coordinating these new gate stack activities
on a global scale, by sharing cost and risk, and by combining expertise."

"We are excited about the Japanese company Hitachi joining our worldwide team of experts 
on high-k dielectrics," adds Gilbert Declerck. "This agreement together with the recent 
partnership with International SEMATECH, brings together a majority of the world's 
semiconductor manufacturers to find a replacement for current gate stack materials."

"We are very pleased to have collaboration with IMEC on development of high-k dielectrics", 
states Tadashi Ishibashi, President & Chief Executive Officer, Semiconductor & Integrated 
Circuits of Hitachi. "This cooperation will accelerate developing new gate stacks more 
than Hitachi to do so by itself."

About Hitachi
Hitachi, Ltd., headquartered in Tokyo, Japan, is one of the world's leading global 
electronics companies, with fiscal 1999 (ended March 31, 2000) consolidated sales of 
8,001 billion yen ($75.5 billion*). The company manufactures and markets a wide range of 
products,including computers, semiconductors, consumer products and power and industrial 
equipment. For more information on Hitachi, Ltd., please visit Hitachi's web site at 
URL:http://global.hitachi.com/ Hitachi's semiconductor business web site/home 
page address:URL:http://global.hitachi.com/Sicd/index.htm
*At an exchange rate of 106 yen to the dollar.

About IMEC
IMEC was founded in 1984 and today is Europe's leading independent research center 
for the development and licensing of microelectronics, and information and communication 
technologies (ICT). IMEC is headquartered in Leuven, Belgium, and has a staff of more 
than 1000 people including more than 200 industrial residents. Its more than $100 million 
revenue is derived from agreements and contracts with Flemish government, the EC, MEDEA, 
the European Space Agency, equipment and material suppliers and semiconductor companies 
worldwide. IMEC's activities concentrate on design of integrated information and 
communication systems; silicon process technology; silicon technology and device 
integration; microsystems, components and packaging; advanced training in microelectronics. 
IMEC has a sub-0.25¦Ìm 200mm pilot line and is ISO9001 certified. News from IMEC is 
located at URL:http://www.imec.be.