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January 22, 2018
A high-sensitivity low-power MEMS accelerometer for detecting extremely weak ground and building vibrations
Control IC, detection IC and MEMS device in the accelerometer (left),
moving mass inside the MEMS device (right)
Hitachi today announced the development of a high-sensitivity low-power MEMS accelerometer that can detect extremely weak ground and building vibrations by combining sophisticated MEMS technology with circuit technology. The sensor achieves a comparable sensitivity to that of sensors for oil & gas exploration with less than half the power consumption.
Hitachi intends to apply this sensor to various applications including next generation oil & gas exploration, and infrastructure monitoring, to contribute to the realization of a comfortable, safe and secure society.