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Hitachi Research & Development

Hitachi

Nanoimprint is the new nano-scale fabrication technology which enable the formation of nano-structures as easily as like printing, and expected for IT/electronics, bio/life scienceand energy/environment applications.

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Appearance and schematic diagram of developed sheet nanoimprint equipment
- Continuous process of heating, pressing, cooling and parallel separation -

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Example of imprinted high aspect ratio pattern
(Scanning electron microscopy)

Sheet nanoimprint technology is expected as a breakthrough in nanoimprint field for its enormous productivity.