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High-resolution characterization of microstructures is indispensable for successful development of present-age electronic, magnetic, and structural materials.
A transmission electron microscope (TEM) equipped with an energy filter is an effective tool for investigating the microstructure of materials. Elemental maps can be obtained from energy-filtered images by extracting the core-loss energy of desired elements.
This paper discusses the high spatial resolution elemental mapping of magnetic materials, including magnetic multilayers and magnetic media, using a TEM equipped with an energy filter. Spatial resolutions on the order of 1 nm are achieved. The system can be applied to the analysis of not only magnetic materials but also semiconductor and structural materials.