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Elemental Mapping Using an Energy-Filter-Equipped TEM with Application to Magnetic Materials

Koji Kimoto, Hitachi Research Laboratory, Hitachi, Ltd.
Katsuhisa Usami, Hitachi Research Laboratory, Hitachi, Ltd.
Yotsuo Yahisa, Data Storage and Retrieval Systems Division, Hitachi, Ltd.
Shinji Narishige, Data Storage and Retrieval Systems Division, Hitachi, Ltd.

ABSTRACT

High-resolution characterization of microstructures is indispensable for successful development of present-age electronic, magnetic, and structural materials.

A transmission electron microscope (TEM) equipped with an energy filter is an effective tool for investigating the microstructure of materials. Elemental maps can be obtained from energy-filtered images by extracting the core-loss energy of desired elements.

This paper discusses the high spatial resolution elemental mapping of magnetic materials, including magnetic multilayers and magnetic media, using a TEM equipped with an energy filter. Spatial resolutions on the order of 1 nm are achieved. The system can be applied to the analysis of not only magnetic materials but also semiconductor and structural materials.


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