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3-MV Ultra-High Voltage Electron Microscope

Teiji Katsuta, Instrument Division, Hitachi, Ltd.
Soichiro Hayashi, Instrument Division, Hitachi, Ltd.
Akio Takaoka, Osaka University

ABSTRACT

Hitachi has recently completed the development of a 3-MV ultra-high voltage electron microscope. The high voltage generator has been designed for high-efficiency operation by minimizing power loss in capacitors and by incorporating a 6-stage magnification lens.

The system is equipped with TV cameras which allow remote operation of the microscope in a normally lighted operation room. The system also features built-in on-line image processing.


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