| Yasutsugu Usami | Products Marketing Dept, Device Manufacturing Systems Business Gr., |
| Naoyuki Eguchi | Products Marketing Dept, Device Manufacturing Systems Business Gr., |
| Seiji Isogai | Naka Div., Design & Manufacturing Gr., |
Among LSI (large-scale integration) manufacturers, yield enhancement is one of the essential means of securing a profit. For this purpose, semiconductor inspection systems are required to handle a larger number of defects to be detected and localize the faulty points. To cope with the above, Hitachi High-Technologies Corporation has been offering the following solutions for supporting efficient review of such a large number of defects and enhancing yield: (1)“yield enhancement system” for connecting inline inspection tools and defect review tools, (2) “inline inspection solution” for inline control of wafer production process and localization of a faulty process causing the detected defects.
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The Hitachi Hyoron (Japanese Only) |
semiconductor device manufacturing, wafer inspection system, automatic defect review system, solution, yield control
