| Takahiro Onai, Dr.Eng. | ULSI Research Dept., Central Research Lab., |
| Shinichiro Kimura, Dr. Eng. | Solution LSI Research Center, the ULSI Research Dept., Central Research Lab., |
| Kazuyuki Suko | Process Development Dept., Wafer Process Engineering Development Div., LSI Manufacturing Technology Unit, |
| Hiroshi Miyazaki, Dr.Eng. | Process Development Dept., Wafer Process Engineering Development Div., LSI Manufacturing Technology Unit, |
| Fumiko Yano, Dr.Eng. | Process & Device Analysis Engineering Development Dept., Wafer Process Engineering Development Div., LSI Manufacturing Technology Unit, |
Semiconductor manufacturers' particular emphasis is on providing LSI (large-scale integration) devices as best solutions in its lineup of microcomputer-based specialty products. This will involve not only performance and functionality, but an equal emphasis on holding down costs, achieving exceptional reliability, and minimizing time to market in developing new products. Supporting these efforts are semiconductor device technology and manufacturing equipment built by Hitachi Group, common technologies developed through national projects and consortiums, and high-reliability high-yield manufacturing technologies. By combining a silicon technology platform based on these manufacturing technologies and core technology-based devices, the Hitachi Group contributes to produce a wide range of specialty products and responds quickly to new user demands.
semiconductor device technology, manufacturing equipment, high-reliability, high-yield, silicon technology platform
