Hitachi's Key Technologies Supporting Advanced Devices : Volume 57 Number 3 June 2008 : Hitachi Review

Preface

R&D Prospects of Organic Electronic Devices: Tadashi Arai, Dr. Eng. / Masayoshi Ishibashi, Dr. Eng. / Masahiro Kawasaki / Takeo Shiba, Dr. Eng.
Layout Design and Lithography Technology for Advanced Devices: Shoji Hotta / Shinji Okazaki, Dr. Eng.
The Challenge to New Metrology World by CD-SEM and Design: Shunsuke Koshihara / Yoshihiro Ota / Hideo Sakai / Ryoichi Matsuoka
"MARORA"—A Plasma Selective-oxidation Apparatus for Metal-gate Devices: Tadashi Terasaki / Masayuki Tomita / Katsuhiko Yamamoto / Unryu Ogawa, Dr. Eng. / Yoshiki Yonamoto, Dr. Sci.
Hitachi's High-end Analytical Electron Microscope: HF-3300: Takeshi Sato, Dr. Sci. / Hiroaki Matsumoto / Mitsuru Konno / Yoshifumi Taniguchi, Dr. Eng. / Shuichi Mamishin
Direct Drive Modular Mounter "GXH-3" Contributing to High Productivity and High Density Placement: Hideaki Fukushima / Yoshinao Usui / Ikuo Takemura / Shigeo Katsuta
One Drop Filling for Liquid Crystal Display Panel Produced from Larger-sized Mother Glass: Akira Hirai / Isao Abe / Masaru Mitsumoto / Shigeru Ishida

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