Hitachi Review

Hitachi's Key Technologies Supporting Advanced Devices

Volume 57 Number 3 June 2008

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Hitachi

Hitachi Review

Featured Articles

R&D Prospects of Organic Electronic Devices
Tadashi Arai, Dr. Eng. / Masayoshi Ishibashi, Dr. Eng. / Masahiro Kawasaki / Takeo Shiba, Dr. Eng.
Layout Design and Lithography Technology for Advanced Devices
Shoji Hotta / Shinji Okazaki, Dr. Eng.
The Challenge to New Metrology World by CD-SEM and Design
Shunsuke Koshihara / Yoshihiro Ota / Hideo Sakai / Ryoichi Matsuoka
"MARORA"—A Plasma Selective-oxidation Apparatus for Metal-gate Devices
Tadashi Terasaki / Masayuki Tomita / Katsuhiko Yamamoto / Unryu Ogawa, Dr. Eng. / Yoshiki Yonamoto, Dr. Sci.
Hitachi's High-end Analytical Electron Microscope: HF-3300
Takeshi Sato, Dr. Sci. / Hiroaki Matsumoto / Mitsuru Konno / Yoshifumi Taniguchi, Dr. Eng. / Shuichi Mamishin
Direct Drive Modular Mounter "GXH-3" Contributing to High Productivity and High Density Placement
Hideaki Fukushima / Yoshinao Usui / Ikuo Takemura / Shigeo Katsuta
One Drop Filling for Liquid Crystal Display Panel Produced from Larger-sized Mother Glass
Akira Hirai / Isao Abe / Masaru Mitsumoto / Shigeru Ishida
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