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We have developed a device for displaying TV-rate 3D images on a monitor by tilting the electron beam of an SEM to the left and right for each scan line to acquire dual (stereoscopic) images simultaneously. It has also improved the resolution of stereoscopic imaging by developing optics that minimize the off-axial aberrations that are associated with this electron beam tilting. Among the benefits of this realtime stereo SEM is that 3D imaging makes it possible to manipulate the sample under observation. Its effectiveness for this purpose was demonstrated by installing a prototype micro-manipulator in an SEM sample chamber and using it in a realtime stereo SEM to perform microanatomical dissections on biological samples.
Professor, Division of Microscopic Anatomy, Graduate School of Medical and Dental Sciences, Niigata University. He is currently engaged in the imaging of cells and tissues by scanning electron microscopy, and the application of scanning probe microscopy to biology. Dr. Ushiki is a member of the Japanese Association of Anatomists (JAA) and the Japanese Society of Microscopy (JSM).
Professor, Department of Mechanical Engineering, Graduate School of Integrated Science and Technology, Shizuoka University. He is currently engaged primarily in nano-measurement and nano-craft using scanning probe microscopes. Dr. Iwata is a member of The Japan Society of Applied Physics (JSAP), the Japan Society for Precision Engineering (JSPE), and the Surface Science Society of Japan (SSSJ).
Electron Microscope Systems Design 2nd Department, Science Systems Product Division, Science & Medical Systems Business Group, Hitachi High-Technologies Corporation. He is currently engaged in the design and development of SEMs.
Science Systems Division, Science & Medical Systems Business Product Group, Hitachi High-Technologies Corporation. He is currently engaged in managing the design and development of SEMs, transmission electron microscopes, and focused ion beam systems. Mr. Ito is a member of the JSM.