Hitachi Review

Measurement of Microscopic Three-dimensional Profiles with High Accuracy and Simple Operation

—AFM5500M Scanning Probe Microscope—

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Hitachi Review

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SPMs are able to measure the surface profile of a sample and its mechanical and electrical characteristics with sub-nanometer resolution. Hitachi High-Tech Science developed the AFM5500M SPM, which can accurately measure three-dimensional profiles, to meet demand from industrial measurement applications. Its simple operation reduces the operator’s workload by providing features such as an automatic adjustment mechanism for the optical axis of the cantilever and automatic adjustment of measurement parameters. It also has a linkage function for correlation with an SEM or a CSI to enable complementary observation and measurement, and measurement of physical properties of the same area on the sample. This article describes the AFM5500M and its linkage function together with example measurements.

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ABOUT THE AUTHORS

Satoshi Hasumura

Analytical Instruments Design Group 2, Analytical Instruments Design Department, Hitachi High-Tech Science Corporation. He is currently engaged in the management and development of a scanning probe microscope.

Shigeru Wakiyama

Analytical Instruments Design Group 2, Analytical Instruments Design Department, Hitachi High-Tech Science Corporation. He is currently engaged in the development of a scanning probe microscope.

Masato Iyoki

Application Engineering Section Tokyo 2, Hitachi High-Tech Science Corporation. He is currently engaged in the application development of a scanning probe microscope.

Kazunori Ando

Analytical Instruments Design Group 2, Analytical Instruments Design Department, Hitachi High-Tech Science Corporation. He is currently engaged in the development of a scanning probe microscope.

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