| Yasutsugu Usami | Electronics Systems Operations of the Instruments, |
| Seiji Isogai | Electronics Systems Operations of the Instruments, |
| Isao Kawata | Electronics Systems Operations of the Instruments, |
The miniaturization of semiconductor devices is accelerating year by year, as represented by the technical roadmap of ITRIS (International Technology Roadmap for Semiconductors). Along with this trend, the increasing cost of inspection tools and systems is becoming an issue. Based on its know-how of how to optimize operations and support applications, Hitachi has developed an integrated inspection and evaluation system with a high return on investment (ROI) as a solution.
Defect, Inspection, Metrology, Evaluation, Yield
