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HITACHI REVIEW

Hitachi

e-diagnostics Technology for Supporting e-manufacturing

AUTHORS

Shigeyasu Sako QA Dept., Kasado Div., Hitachi High-Technologies Corporation
Hideyuki Yamamoto Design Dept., Kasado Div., Hitachi High-Technologies Corporation
Hideaki Kondo Design Dept., Kasado Div., Hitachi High-Technologies Corporation
Juntaro Arima Software Systems Design Dept., Naka Div., Hitachi High-Technologies Corporation

OVERVIEW

In order to support the volume production of advanced semiconductor devices in the 90-nm node, in addition to rapid startup, confirmation, and repairs of equipment at the device manufacturer's site, e-diagnostics is required to provide a broad range of support services, including preventative maintenance and process support. Specific results that can be expected are: (1) reduction in MTTR (mean time to repair), (2) increased operation rate, and (3) reduction in maintenance management costs.

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RELEVANT SITES

open in new window Hitachi High-Technologies Corporation
open in new window The Hitachi Hyoron (Japanese Only)

KEYWORDS

e-diagnostics, e-manufacturing, semiconductor, MTTR

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