| Kuniyasu Nakamura | Advanced Microscope Systems Design 2nd Dept., Naka Div., Nanotechnology Products Business Gr., |
| Hiromi Inada | Advanced Microscope Systems Design 2nd Dept., Naka Div., Nanotechnology Products Business Gr., |
| Hiroyuki Tanaka | Advanced Microscope Systems Design 2nd Dept., Naka Div., Nanotechnology Products Business Gr., |
| Mitsuru Kondo | Naka Application Center, Naka Div., Nanotechnology Products Business Gr., |
| Taro Ogawa, Dr. Eng. | Product Marketing Dept., Advanced Equipment & Systems Sales Div., |
It has been a long-held dream of electron microscopy engineers to correct or eliminate the spherical aberration that theoretically occurs in the electron optics, a development that would dramatically improve the resolution of electron microscopes. Now Hitachi High-Technologies Corporation has developed the HD-2700, a next-generation STEM that is equipped with a spherical aberration corrector. Essentially, the corrector acts as a kind of concave lens that reduces the spherical aberration of the electron optics to the absolute minimum. As a result, a much smaller probe diameter is obtained while keeping the larger convergence angle, and this provides significantly improved resolution and analytical sensitivity. It is anticipated that the HD-2700 STEM will prove to be a powerful analytical tool in researching and developing next-generation semiconductors, materials, and nanotechnologies.
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The Hitachi Hyoron (Japanese Only) |
STEM, HAADF-STEM, BF-STEM, Aberration Correction, EDX
