HITACHI : Hitachi's High-end Analytical Electron Microscope: HF-3300

Volume 57 Number 3 June 2008

AUTHORS

Takeshi Sato, Dr. Sci.	Naka Application Center, Naka Div., Nanotechnology Products Business Group, Hitachi High-Technologies Corporation
Hiroaki Matsumoto	Naka Application Center, Naka Div., Nanotechnology Products Business Group, Hitachi High-Technologies Corporation
Mitsuru Konno	Naka Application Center, Naka Div., Nanotechnology Products Business Group, Hitachi High-Technologies Corporation
Yoshifumi Taniguchi, Dr. Eng.	Advanced Microscope Systems Design Second Dept., Naka Div., Nanotechnology Products Business Group, Hitachi High-Technologies Corporation
Shuichi Mamishin	Advanced Microscope Systems Design Second Dept., Naka Div., Nanotechnology Products Business Group, Hitachi High-Technologies Corporation

OVERVIEW

A 300-kV cold FE-TEM, the HF-3300, has been developed by Hitachi High-Technologies Corporation. This TEM has next-generation analytical capabilities and a cold field emission electron source. Available for this TEM is a cold FE gun for higher brightness and added coherency. Functions of cold FE allow for different types of analysis in various fields through the use of unique technologies. As a result, this TEM can meet demands for the advanced analyses for use in developing semiconductor devices, in failure analysis, and process reaction under the material boundary. The HF-3300 TEM will also be useful for various areas of analysis in physical science.

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CONTACT FOR INQUIRY

Naka Application Center, Naka Division,
Hitachi High-Technologies Corporation
TEL: +81-29-354-1970
FAX: +81-29-354-1971

RELEVANT SITE

The Hitachi Hyoron (Japanese Only)

KEYWORDS

transmission electron microscopy, cold FE-TEM, electron holography, EELS, spatially resolved EELS

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