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    Hitachi High-Technologies developed the AE1500, a tabletop atmospheric SEM that is capable of scanning electron microscopy under atmospheric pressure, by using a membrane that allows an electron beam to pass while keeping the atmospheric-pressure chamber and evacuated column separate. Because the specimen does not come into contact with the membrane, a feature of the AE1500 is its ability to observe bulk specimens under atmospheric pressure. Hitachi High-Technologies also developed the ES-Corrector algorithm to correct the image for the electron beam scattering that occurs due to the presence of atmospheric gases between the membrane and the specimen. This means that bulk, high-moisture specimens such as food or biological samples can be observed with the electron microscope under atmospheric pressure without preprocessing.

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    ABOUT THE AUTHORS

    Yusuke Ominami, Dr. Eng.

    Electron Microscope Systems Design 2nd Department, Science Systems Division, Science & Medical Systems Business Group, Hitachi High-Technologies Corporation. He is currently engaged in the development of SEM systems. Dr. Ominami is a member of the Japanese Society of Microscopy (JSM) and the Vacuum Society of Japan (VSJ).

    Kenji Nakahira, Dr. Eng.

    Inspection and Measurement Research Department, Center for Technology Innovation – Production Engineering, Research & Development Group, Hitachi, Ltd. He is currently engaged in the research of signal processing and image processing. Dr. Nakahira is a member of The Institute of Electronics, Information and Communication Engineers (IEICE) and the IEEE.

    Akiko Hisada

    Biosystems Research Department, Center for Technology Innovation – Healthcare, Research & Development Group, Hitachi, Ltd. She is currently engaged in the research and development of observation techniques for biological samples using electron microscopes. Ms. Hisada is a member of The Molecular Biology Society of Japan (MBSJ).

    Makoto Nakabayashi

    Electron Microscope Systems Design 2nd Department, Science Systems Division, Science & Medical Systems Business Group, Hitachi High-Technologies Corporation. He is currently engaged in the development of the Atmospheric SEM.

    Minami Shoji

    Biosystems Research Department, Center for Technology Innovation – Healthcare, Research & Development Group, Hitachi, Ltd. She is currently engaged in the research and development of atmospheric SEM at Hitachi High-Technologies Corporation as a visiting researcher. Ms. Shoji is a member of the Japan Society of Applied Physics (JSAP).

    Mai Yoshihara

    Electron Microscope Systems Design 2nd Department, Science Systems Division, Science & Medical Systems Business Group, Hitachi High-Technologies Corporation. She is currently engaged in the application development of bio-imaging using the Atmospheric SEM. Ms. Yoshihara is a member of the Japanese Society of Plant Morphology (JSPM) and the Botanical Society of Japan (BSJ).

    Kenichi Sato

    Science Systems Marketing Department, Science & Medical Systems Business Group, Hitachi High-Technologies Corporation. He is currently engaged in the marketing of electron microscopes.

    Sukehiro Ito

    Science Systems Division, Science & Medical Systems Business Group, Hitachi High-Technologies Corporation. He is currently engaged in the general supervision of science system equipment. Mr. Ito is a member of the JSM.

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