1. VS1800 Nano 3D Optical Interferometer
A requirement during the research and development of industrial products, and for their quality inspection once in production, is to be able to measure the surface quality of the parts and materials used. The challenge, however, as the performance and functionality of these products improves, is that high levels of resolution and precision are required for these measurements. There is also strong demand for making measurements faster and easier to perform.
In response to these requirements, Hitachi has launched the VS1800* nano 3D optical interferometer. The VS1800 uses the principle of optical interference to measure surface quality over a wide area (up to 6.4 mm) in just a few seconds, achieving vertical resolution of 0.01 nm, equivalent to that of a scanning probe microscope (SPM). Its capabilities also include the cross-sectional measurement of multi-layer transparent film, providing noncontact/nondestructive detection of things like film thickness and the presence of delamination or impurities in the film.
The VS1800 also expands the scan range and sample thicknesses compared to the scanning white light interferometric microscopes supplied in the past, being able to measure heights of up to 10 mm on samples with thicknesses up to 100 mm. In other words, the VS1800 can perform height measurements from the nanometer to the millimeter scale.
(Hitachi High-Technologies Corporation)
- The VS1800 is only available in Japan, China, and Taiwan.