1. Semiconductor Technology Trends and Customer Needs for Manufacturing, Metrology, and Inspection Systems
Demand for semiconductors is growing as a fundamental technology supporting the digital society, including the Internet of Things (IoT), artificial intelligence (AI), fifth generation (5G), and autonomous driving as well as electronic devices such as PCs and smartphones.
Further miniaturization of cutting-edge semiconductors is proceeding with the implementation of extreme ultraviolet (EUV)*1 lithography. In the advanced logic, more complicated transistor structures and multiple-chip integration using advanced packaging technology are introduced. Also, continuous dimensional scaling of dynamic random access memory (DRAM)*2 and an increase in the number of layers and bits per cell in 3D-NAND flash memory continue to improve the memory storage density. On the other hand, sensors and power devices, while not requiring the most advanced fine processing, need to ensure higher reliability than before, driven by their increasing demand in automotive and industrial applications.
While these semiconductors’ manufacturing, metrology, and inspection systems require further improvement in productivity and utilization rates, cutting-edge semiconductors require processing accuracy and metrology and inspection accuracy for fabricating their complex structure at the sub-nanometer level. Advanced metrology and inspection systems are also required to ensure high reliability in power and sensor devices.
Hitachi is committed to providing solutions for diversifying customer needs.
(Hitachi High-Tech Corporation)
- An extreme-ultraviolet light source with a wavelength of 13.5 nm.
- A memory element that stores information by storing an electric charge in a capacitor.