1. Cutting-edge Semiconductor Device Technology Trends and Diversifying Customer Needs
The demand for semiconductors is growing as a core technology for supporting a digital society utilizing the Internet of Things (IoT), artificial intelligence (AI), fifth generation (5G) mobile network communication, and autonomous driving, etc. Moreover, semiconductors are an important strategic technology for which many countries are deploying large-scale industrial policies from the perspective of economic security.
Further miniaturization of cutting-edge semiconductor devices is proceeding with the implementation of extreme ultraviolet (EUV)*1 lithography. In terms of advanced logic, more complicated transistor structures and chip-level integration techniques are being introduced. Moreover, an increase in the number of layers in 3D-NAND flash memory and the dimensional scaling and three-dimensional (3D) structure of dynamic random access memory (DRAM)*2 are required to improve the memory storage density.
Sub-nanometer-order processing accuracy and the metrology and inspection accuracy to control that processing are required in manufacturing, metrology, and inspection systems for such cutting-edge semiconductor devices. Moreover, stricter controls are required for the management of defects and variations caused by EUV lithography and the particles that occur during processing by each manufacturing system. To shorten the development time and improve the yield, the demand for high-precision analysis to identify device fault locations is also increasing.
The Hitachi Group is committed to providing solutions for diversifying customer needs.
(Hitachi High-Tech Corporation)
- Extreme ultraviolet light source with a wavelength of 13.5 nm.
- Memory element that stores electric charge in a capacitor to retain information.